JPH01141454U - - Google Patents

Info

Publication number
JPH01141454U
JPH01141454U JP3877888U JP3877888U JPH01141454U JP H01141454 U JPH01141454 U JP H01141454U JP 3877888 U JP3877888 U JP 3877888U JP 3877888 U JP3877888 U JP 3877888U JP H01141454 U JPH01141454 U JP H01141454U
Authority
JP
Japan
Prior art keywords
coating
film
light
output signal
pinhole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3877888U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3877888U priority Critical patent/JPH01141454U/ja
Publication of JPH01141454U publication Critical patent/JPH01141454U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP3877888U 1988-03-24 1988-03-24 Pending JPH01141454U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3877888U JPH01141454U (en]) 1988-03-24 1988-03-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3877888U JPH01141454U (en]) 1988-03-24 1988-03-24

Publications (1)

Publication Number Publication Date
JPH01141454U true JPH01141454U (en]) 1989-09-28

Family

ID=31265317

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3877888U Pending JPH01141454U (en]) 1988-03-24 1988-03-24

Country Status (1)

Country Link
JP (1) JPH01141454U (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010210568A (ja) * 2009-03-12 2010-09-24 Hitachi High-Technologies Corp 欠陥検査装置及び欠陥検査方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5175495A (en) * 1974-12-25 1976-06-30 Hitachi Shipbuilding Eng Co Hakumakutono hinshitsukensanohohoto sochi
JPS53143384A (en) * 1977-05-20 1978-12-13 Yaskawa Denki Seisakusho Kk Pinhole detector

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5175495A (en) * 1974-12-25 1976-06-30 Hitachi Shipbuilding Eng Co Hakumakutono hinshitsukensanohohoto sochi
JPS53143384A (en) * 1977-05-20 1978-12-13 Yaskawa Denki Seisakusho Kk Pinhole detector

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010210568A (ja) * 2009-03-12 2010-09-24 Hitachi High-Technologies Corp 欠陥検査装置及び欠陥検査方法

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